A delta robot comprising a stationary base and a movable platform that is connected to the base with three chains of links, and comprising a balancing system incorporating at least one pantograph for balancing the robot’s center of mass, wherein the at least one pantograph has a first free extremity at which it supports a countermass which is arranged to balance the center of mass of the robot. A location may be read from a base, such as a card, using a digital pen. In a method for manufacturing a semiconductor device which includes a thin film transistor where a semiconductor layer having a channel formation region, a source region, and a drain region are formed using an oxide semiconductor layer, heat treatment is performed so as to improve the purity of the oxide semiconductor layer and reduce impurities such as moisture. Further, the symmetric axis of the aspherical surface passes the framing reference point. Also disclosed are coated substrates produced thereby.