A workflow management system and method that includes approval of workflow changes. Cross-over switches are connected with a corresponding input terminal of the motor and can switch the input terminal between a corresponding output terminal of the pulsed inverter and a terminal of a corresponding brake resistor. The display is pivotable with respect to the support member around a second axis between a first position, called a non pivoted position, and a second position, called a pivoted position, wherein the first axis and the second axis are parallel to each other. Also included in the method is plasma etching a contact hole through the dielectric layer in a plasma processing chamber. A list of checked images in the entire taken images is displayed in a checked-image display field, computation is made to what time during an observation period each checked image corresponds is computed, and a mark is displayed with a scale of the average color bar by a number corresponding to each checked image on the average color bar.