The present invention provides a test circuit configuration technology suitable for use in a semiconductor device, which is capable of testing the semiconductor device without using a commercially-available tester and is less reduced in required cost. A low-k material such as a thermoset organic polymer is used for the ILD and IMD. In addition there is relative lateral movement between the teats and the at least one fluid flow outlet to remove disinfectant solution from the teats or dry the teats.