An object of the present invention is providing a semiconductor device that is capable of improving the reliability of a semiconductor element and enhancing the mechanical strength without suppressing the scale of a circuit. Also described are a system and a method for deployment of the microdialysis probe within the body and a technique for deriving a metabolite concentration of the basis of a rate of change of an optical parameter. A cooling network is formed by coupling blocks of Thermal Energy Storage modules together with optional thermal switches or valves and optionally with an active cooling component to maintain a cryogenic temperature in a cryostat. % of magnetically hard particles, preferably barium hexaferrite single crystals of between 80 and 550 nm and with a coercive force ranging from 80,000 to 1,600,000 Am; and 0. The coil pattern provided in the second outer surface layer and the first and second heat-dissipation patterns are separated from each other. Also provided is an apparatus for processing semiconductor wafers comprising a prepost process transfer chamber housing multiple independent robot assemblies and surrounded by a plurality of pre-process chambers and post process chambers.