Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. The actuator plate 19 transmits thereby a vibration signal represented by an oscillating vibratory force to the top plate assembly 12 to operate the oscillating vibration device. The liquid transfer system is comprised of a vial capperdecapper assembly that is positioned adjacent to the transport path and includes a plurality of rotatable spindles. A second substrate having a second patterned circuit layer thereon is provided. 001 to 5 wt % quaternary compound; a material having a formula :wherein R is selected from C2-C20 alkyl, C2-C20 aryl, C2-C20 aralkyl and C2-C20 alkaryl wherein x is an integer from 0 to 20; wherein y is an integer from 0 to 20; wherein x+y\u22671; and, wherein the chemical mechanical polishing composition has a pH\u22665.