The slackline balance board is for use during slacklining It includes an elongated deck having an upper surface and a bottom surface. The plasma is generated within a very short period of time maintaining stability after the microwaves are introduced into the plasma-treating chamber, and the treatment is accomplished maintaining stability. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. Next, a second barrier layer and a metal gate layer are sequentially formed on the dielectric layer.