The disclosure describes an economical and environmentally benign method for using crystalline silicon metal kerf recovered from wiresaw slurries towards the fabrication of complex MEMS and MEMS components, including MEMS packages, with improved design features. Embodiments include exposing a deposited dielectric layer to ionic radiation, as with Helium ion implantation, to form voids within the layer, thereby reducing its dielectric constant. The frequency modulated EGM data that is transmitted from the patient monitor may in turn be displayed, in real-time, at a remote monitoring station in response to commands provided by a remote signal from a receiving station. The curved length of the first flexible cable is passed through the loop in the second flexible cable and through the grommet so that a part of the first flexible cable protrudes from the grommet. At the destination 20, the unique characteristic andor detectable characteristic can be detected to correct space andor time errors in the streams of data. The microscope and method are referred to herein as Inverted Darkfield Contrast and are believed to be particularly suitable for viewing live cells in real time with no staining or preparation.