A photomask fabricated by a photomask fabrication method has a transparent substrate, a shade pattern formed in a hollow section, and a phase shift pattern having a flat surface that is selectively formed on the transparent substrate and the shield pattern. A user may indicate a relevance rating associated with a tag. The injection device further comprises a resilient member adapted to provide a force necessary for ejecting a dose from the injection device. The shaft moves back and forth along its length to accomplish scanning, and rotates about this axis to allow variable workpiece positioning during treatment as well as rotation of the platen to the horizontal position for workpiece exchange. The nitrogen vacancy surface layer lacks a nitrogen element. Each of the anode and cathode electrodes is formed of a solid agglomerate of a conductive material mixed with the appropriate enzyme and redox mediator and is solid with an electrode wire.