A header for a combine or harvester has a frame with a longitudinal dimension transverse to a direction of travel of the combine or harvester. The method includes simultaneously forming a plurality of deep trenches and one or more isolation trenches surrounding a group or array of the plurality of deep trenches through a SOI and doped poly layer, to an underlying insulator layer. The plurality of sensors may be of one or more sensor types. The method also includes establishing a plurality of digital subscriber line connections with the communications device. A substrate 1 constituting a pressure chamber plate is joined to the thin film piezoelectric elements 5, and the thin film piezoelectric elements 5 are removed from the forming plate 8. The water is pushed by the flow of air, to thereby advance toward a chamber exit 104.