A design for a differential amplifier with a large input common mode signal range. First, at least one bonding pad exposed by a first passivation layer is provided. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. A sensing action allows to sense whether any incremental changes in rotor position occur in response to the energizing action. Radiation emitted from the radiation source is injected on the power generation panel and is moderated by the moderator member.