A video tracking system and method which includes a video camera having a selectively adjustable panning orientation, tilting orientation and focal length. The method includes determining actual torques for each active joint of an actuated arm mechanism and calculating expected torques for each active joint of the actuated arm mechanism, wherein the expected torques are calculated based on an angular position of each active joint and a commanded joint angle for each active joint. Manufacturing control and the interlock between the wafer fabrication and the mask fabrication are enhanced, allowing for improved quality of the final product.