1460850350-7d391de0-5833-4382-84d5-f0087a03f3b8

A method is disclosed for measuring components using a measurement system guided by a manipulator. The cartridge is comprised of a hollow body defined by an enclosing wall that has a closure at an upper end and a lower cartridge wall that is integral to the hollow body, but of a thickness less than that of the hollow body enclosing wall. The illuminator blade acts as a waveguide to transmit light by total internal reflection. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The invention also provides methods and compositions suitable for therapeutic applications. The response may then be forwarded to the requesting device.