By forming a non-oxidizable liner in isolation trenches, the creation of compressive stress may be significantly reduced, wherein, in illustrative embodiments, silicon nitride may be used as liner material. These compounds have activity as SHIP1 modulators, and thus may be useful in treating a variety of diseases, disorders or conditions that would benefit from SHIP1 modulation. The at least one evaporator surface unit is formed of planar water tube panels that extend from the bottom of the furnace to the ceiling of the furnace, and consists of two cross-wise joined vertical water tube panels. In addition, when a channel width is longer than a channel length, the area of the channel formation region can be increased. The second interrelating mechanism includes an engaging portion for engaging the shutter member with the developing device by moving the shutter member to the retracted position and includes a releasing portion for releasing engagement between the shutter member and the developing device by moving the shutter member to the opposing position.