A transport unit transfers a substrate between a chamber enclosing a substrate table and a processing unit that process a substrate before and after exposure in a substantially contaminant free environment to minimize the exposure of the resist on the substrate to the contaminants. The object is achieved by the following. Next, the system identifies which of the system classes can be initialized at build time and then initializes the identified system classes. Each of the manifolds is suspended between adjacent two of the connecting accessories and has inlet and outlet ports at opposite ends.