1460862746-d4078658-5f07-48c8-b069-ef434ff6683c

A torsion damping mechanism with a torsion damper with an input side and an output side, which are connected elastically to each other by spring-type stored-energy elements, and with an auxiliary mass which can rotate coaxially to the torsion damper. The rod is radially adjustable and a sleeve is disposed on the rod, for tuning the plate by slidably adjusting the rod radially. Each lookup table stores data that are computed under a different illumination and feature fabrication or placement conditions. An external connection terminal is formed on the other surface of the substantially flat interconnection substrate so as to penetrate through the substantially flat interconnection substrate and be electrically connected to the interconnection pattern.