In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. The method comprises first creating a graphical program. The wobble signal processing section differentiates the reproduced signal and binarizes the differential signal with reference to a zero level. The apparatus further includes a drive system for automatically rotating the plurality of first rollers in both clockwise and counterclockwise directions to load the sheet material onto and out of the tray portion. The electrolyte improves discharge, low temperature, and cycle life characteristics of a lithium secondary battery. Furthermore, while an address administration table is set to a network node apparatus of an IP transfer network, means for registering addresses of the terminals into this address administration table is employed, so that an IP packet communication by a multicast manner can be realized with improving information security performance.