A USB terminal having a conductor layer to be an inputoutput terminal of a USB connector is formed on a first principle surface of a circuit board. The immersion objective lens condenses light from a sample through liquid. A gate is deposited above the silicon layer. If a measured total indicated runout of a circular cross-section in question is less than this screening value, then the cross-section is acceptable. Other features, applications, and methods can be included. The wafer stage enables performance of wafer processing while letting a wafer be mounted on the ceramic plate.