The present invention provides novel isoquinolinium compounds, methods of producing the isoquinolinium compounds, and methods for converting them into cisatracurium, e. The substrate table position measurement system includes a substrate table reference element mounted on the substrate table and a first sensor head. The clamping mechanism also allows easy removal of the housing if, for some reason, the housing must be removed because the clamping mechanism is bidirectional and may be stowed within a groove on an outer surface of the housing. Routing platform also affords remote control of the networked equipment. The IDs of stored articles can be managed, resulting in advanced operations.