A delivery device for coupling to the mouth of a container, for controlled delivery of fluids andor flowing substances, includes an inlet opening, an outlet opening and a substantially \u201cS\u201d shaped delivery path connecting the inlet and outlet openings. The wafer forming method can separate respective chips from others by performing a Deep Reactive Ion Etching process on a wafer including a plurality of chips. The forward junction voltage and the thermal voltage are combined to produce the reference voltage in a manner that avoids generating any voltage having a magnitude that is greater than the magnitude of the sum of the forward voltage and the thermal voltage.