Vapor deposition particles discharged from at least one vapor deposition source opening pass through a plurality of limiting openings of a limiting unit and a plurality of mask openings of a vapor deposition mask, and adhere to a substrate that relatively moves along a second direction so as to form a coating film. Attachment components are removably secured to a ceiling plate connected to a house circuit in an initial room then capable of easy removal therefrom and attachable to a ceiling plate installed in another room. As one embodiment, two flexible impermeable tubes operable to receive two fluids of different pressures respectively connect to flow control valves. During an actual mold closing operation, the physical value related to mold closing operation is periodically detected in the monitor region, and a deviation between the detected physical value and the determined theoretical value is calculated.