Based on a sounding reference signal, a base station apparatus performs efficient scheduling. The red-reflecting film is continuously formed without separating at an intersection of the two reflecting films. The gas and the processing liquid are mixed in a mixing area below the inner cylindrical member to generate fine droplets, and the droplets are ejected from an outlet of a lower end of the outer cylindrical member onto a substrate. A vacuum generating mechanism is configured to remove air from the vacuum pocket through an aperture in the lower housing portion. Upon detecting a leak, the monitoring system provides an indication as to the leak being in the outer section or in the inner section, and upon detecting a leak, the monitoring system also provides an indication as to which of the zones the leak is detected.