A stacked film of a first insulation film being a silicon oxide film with an extremely low moisture content, and a second insulation film being a silicon oxide film with a higher moisture content than the first insulation film, therefore, with a low in-plane film thickness distribution rate is formed, and this is polished by CMP. The device includes a direct detection backscattered electron detector and a photon detector. The RF transceivers andor audio system may be used to wirelessly communicate between media devices and allow configuration and other data to be wirelessly transmitted from one media device to another media device. At the end of its stroke, the inner cannula makes contact with the cutting board to completely sever the tissue.