A method for fabricating a multilayer ceramic substrate having a cavity with multi-steps therein for mounting an electronic component is provided. A drive control unit supplies of a small driving current, which is sufficient to maintain the movable portion at the closed position, to a coil portion so as to move the movable portion from the opened position to the closed position. The upper harvesting device is in front of the lower harvesting device. If the measured beam profile is not within specification, a scan speed correction that produces a desired profile correction is determined using a calculation which is based on the spatial distribution of the unscanned ion beam. One package employs an interconnect disposed at least partially between a fuel cell and a fuel processor.