A method for fabricating an interconnect structure for interconnecting a semiconductor substrate to have three distinct patterned structures such that the interconnect structure provides both a low k and high structural integrity. A spectral optical element according to the present invention includes a transmission diffraction optical element, and an optical phase control element that is fixed and arranged to be opposed to a diffracted light output surface of the transmission diffraction optical element so that the diffracted light is inputted therein. The spacer block is a generally rectangular block or cube including corded-out cavities to reduce weight and tabs or projections which cooperatively engage the side of the post and the edge of the guard rail to position and hold same in position for attachment with holding members such as bolts. The inner end of each spring motor metal band is secured to the spring-motor secondary winding axle. The webtier runtime can subsequently provide a single point of access to the service, including load-balancing requests to service nodes, or providing support for additional capabilities such as failure detection and failover. The sealing element is essentially an annular design and has an essentially arcuately designed first seal part directed inward in the operating position, with a soft fraction, and an essentially frame-shaped second seal part arranged at the inwardly projecting end of the first seal part, with a hard fraction.