A precursor and method for filling a feature in a substrate. Specifically disclosed are univalent and multivalent vaccines for certain viruses, including adenovirus and coxsackieviruses. The semiconductor integrated circuit has substantially the same length as one side of a display screen of the display device and is obtained by peeling it from another substrate and then forming it on the first substrate. The method of manufacture involves the steps of ultrasonically welding a wide area and then thermally crushing a narrower area overlapping the wide welded area to form leakproof zipper joints. In another embodiment, microchannels can be formed in the lens to increase the oxygen permeability of the lens.