There are provided a method of manufacturing a semiconductor device and a substrate processing apparatus, which are designed to prevent deterioration of the surface morphology of a Ni-containing film caused by dependence on an under layer, and to form a continuous film in a thin-film region. The pool of customers includes a plurality of customers potentially usable to support the demand response event. A first cam follower engages the cam profile on the camshaft, and a second cam follower is disposed between the engagement surface and the cam surface, and is connected to the first cam follower by a rigid follower linkage. \u039412-prostaglandin J3 was shown to be highly effective in eradicating the leukemia stem cells in two murine models of leukemia, thus increasing the survival of the mice. The rotary pressure member presses against the stationary pad via the belt to form a nip therebetween, through which a recording medium is conveyed in a conveyance direction.