A process is provided for filling a muffler shell with fibrous material. A via is formed in an insulating layer over the silicon containing area and a silicide forming material is deposited in the via. A radiation detector system is also provided.
Algorithmically generated prior art
A process is provided for filling a muffler shell with fibrous material. A via is formed in an insulating layer over the silicon containing area and a silicide forming material is deposited in the via. A radiation detector system is also provided.