A barrier metal film such as a TiN film is formed in a contact hole or a via hole. The sensed capacitance varies as a finger or special pointer approaches the surface of the touchscreen without making actual contact, and different thresholds of capacitance can be used to trigger different functions. They can for example be formulated into pharmaceuticals, cosmetics or dietary supplements. The second part shares the second edge with the first part. The pneumatic cushions each have an enclosed chamber that is filled with gas. A micro-jet may be attached to the high power chip.