Micro-electromechanical system devices and methods of manufacture thereof are disclosed. Processes for their preparation their use as therapeutic agents and pharmaceutical compositions containing them. The filtration section includes a filter disposed downstream of the exit opening of the collection cavity so that drainwater which exits the collection cavity is subsequently routed through the filter. In each one of the at least one of the plurality of conditions where the operative surface is bearing against a surface fraction of a head received within the crown, the bearing of the operative surface against the surface fraction of the head is limited to a surface fraction disposed rearwardly of the forehead. The transistor further includes a first diffusion region and a second diffusion region to provide a channel region in the body region between the first diffusion region and the second diffusion region. The tool unit encloses at least one elastically deformable shaped gasket which, with the tool unit closed, adjoins the edge surface of the workpiece in an area adjoining a recessed region of the frame, so that the workpiece is free of foamed or injection molded material adjoining the recessed region after the process of in situ foaming or injecting has been completed.