The embodiments provide structures and mechanisms for removal of etch byproducts, dielectric films and metal films on and near the substrate bevel edge, and chamber interior to avoid the accumulation of polymer byproduct and deposited films and to improve process yield. In another aspect, a method of conveying heat away from a heat-generating element is disclosed that includes transferring heat from the heat-generating element to an anisotropic nanocomposite element that is configured to conduct heat along a selected direction, and transferring heat received by the anisotropic nanocomposite element to a heat-absorbing element. The RUI has the ability to communicate with and control the irrigation components using built-in wireless telemetry technology. The setting information from the in-vehicle apparatus enables the portable terminal to perform an auto-resetting process for redefiningresetting the setting information in order to resumes the application program.