1461012366-150c41bc-1efa-4758-9057-7e5da6823970

The method for producing a micromechanical component includes the following steps: producing a semi-finished micromechanical component; producing openings and forming a cavity; sealing the opening with sealing lids; removing material on the top surface of the first membrane layer, the surface of the first membrane layer being exposed and planarized. Subject of the invention is also a method for the manufacture of the bonding foil as well as its utilization for lining the interiors of motor vehicles. The first and second clock signals and the converted scan start signal have higher magnitudes than the signals outputted from the conversion control part. Particular examples concern the deposition of copper ions. The first member has a width substantially equal to or less than the protrusion width.