A plurality of carbide, such as silicon carbide, tungsten carbide, etc. At least one sensor is coupled to each first control member for sensing a parameter of the first control member and responsively generating a sensor signal. Each magnetic storage cell includes magnetic element. The spacer layer is etchable by the hardmask etch process but resistant to the polymer etch process. A gas containing a deposition gas and hydrogen is supplied to the reaction chamber from the shower plate through the hollow portion of the upper electrode, and a rare gas is supplied to the reaction chamber from a portion different from the upper electrode.