After an upper electrode protective film is formed such that it is in a firm contact with ruthenium film of the upper electrode without damaging the ruthenium film, the upper electrode is etched, thereby, a MIM capacitor is obtained in which leak current is not increased due to oxidation of the ruthenium film of the upper electrode. The apparatus includes a policy repository, a scheduler, a triggering module, a pre-computation module. The housing defines a housing channel. Although operating autonomously, manual operation of the vehicle is possible following the detection of events that suggest manual control is desired. Each of the guides is attached to the upper edge of the perimeter wall and each of the first and second lateral walls has one of the guides attached thereto. It includes, connected to the mass or masses, a feedback control loop for controlling the resonant frequency Fy so that Fy is equal or practically equal to Fx throughout the duration of use of the gyroscope.