Some embodiments of the present invention provide processes and apparatus for electrochemically fabricating multilayer structures with improved endpoint detection and parallelism maintenance for materials that are planarized during the electrochemical fabrication process. The invention further relates to a tool for carrying out said method. The substrate has, on a main surface thereof, a first region in which protrusions are arranged at a small pitch, and second regions in which protrusions are arranged at a large pitch. In another embodiment, the pedestal assembly includes a support member that is coupled to a base by a material layer. The extension member extends from the curved portion beyond the entrance of the concave receiving area. When the patient is exposed to the energy source, the magnetic particles move out of the second coating layer and create channels therein through which the biologically active material can be released.