The invention concerns a colloidal dispersion of a phosphate of a rare earth and a process for its preparation. Recipient transmittal directions, in the form of electronic mail addresses, aliases, or distribution lists are associated with the differing content and attachments for each recipient. Other embodiments are described and claimed. A memory opening is formed through the stack employing a top surface of the high-k dielectric material layer as an etchstop layer, thereby minimizing an overetch.