Embodiments include a chemical processing apparatus and method of using the chemical processing apparatus to treat a substrate with a mono-energetic space-charge neutralized neutral beam-activated chemical process which is comprised of a substantially anisotropic beam of neutral particles. As such, the second coupling member proceeds with a reciprocating movement in a substantially elliptical path which is restrained by the pivot connection between the handle operated member and the lever member. The sprinkler includes a housing, a receiving seat and a sprinkler head. The invention overcomes the speed limitation of the normalized correlation template matching method when the pattern being searched is subject to rotation or size variation. The semiconductor device of the invention can be initialized by a method wherein the actual value is stored as the first reference value. Dry and wet weights of the samples are obtained under different conditions.