1461077483-f6ac9a5d-1cce-456a-bc45-8a0cc556ca5c

To present a material for stamper free from deterioration of stamper quality due to reaction with an electron-attracting radical contained in the resist material. The tile has a tile body with one or more bosses protruding from the cold side thereof. The method also includes receiving content from one or more source systems that provide a feed for the content. Accordingly, a sufficient amount of air for heat exchange can be supplied to the first heat exchanger, while the second and third heat exchangers can be reinforced enough by the reinforcement plates. Also, ridges or valleys in the green make contour reading difficult. for 1 hour, in an amount of 200 ppm or more and 2500 ppm or less on the basis of the weight of the layer; the uniaxially stretched multi-layer laminate film has a polarization degree of 99.