1461083504-c35bc0ab-939d-4313-9900-29cb93bc8dcf

An orientation tracking system including a first tracking system subject to drift. In one branch, there is situated a resonator having a greater ratio of dynamic to static capacitance than in the second branch, so that a filter is obtained having a resulting passband in which one edge is set steeper than the other edge. The method also includes forming a front side opening in the stack, and forming a blocking dielectric, at least one charge storage region, a tunnel dielectric and a semiconductor channel in the front side opening in the stack. At least one interconnect via is embedded within the interlayer dielectric layer, in electrical communication with one of the at least one through-semiconductor vias. The fuselage of the airplane is formed of a deformable material such as a foam to aid in crash resistance.