The present invention provides a motor with differential matching gear. The wavelength conversion material can be annealed by thermal annealing or radiation annealing to increase the wavelength conversion efficiency of the chips or to sinter the wavelength conversion material to form a ceramic material. The base substrate is formed of a laminated body having a plurality of layers stacked on each other, and the light passage hole is formed so that a second opening located on an opposite side to the variable wavelength interference filter is larger in area than a first opening located on the variable wavelength interference filter side.