A method is disclosed for forming a micromechanical device. The method comprises providing a substrate, providing an ion plasma deposition target, and depositing a protective coating onto the substrate using the target in an ion plasma deposition process. The anode voltage is directed to the lower SCR via the resistor such that when the voltage on the anode reaches the triggering voltage of the lower SCR, that SCR triggers and that triggering triggers the upper SCR, such that the stacked SCR’s both trigger and thereby limit the voltage between the anode and the cathode and thereby protecting the target circuit. The damper performance diagnostic includes at least one of: a stuck damper diagnostic, a predictive damper failure diagnostic, an improperly-sized damper diagnostic, and a damper leakage diagnostic. The balloon may be provided with regions of porosity for the delivery of therapeutic agents, and may be treated to exhibit regions of distinct compliance. The program code is configured to perform the corrective action in the environment linked to the femtocell.