An error correction algebraic decoder uses a key equation solver for calculating the roots of finite field polynomial equations of degree up to six, and lends itself to efficient hardware implementation and low latency direction calculation. Preferably the process is carried out using pyridine in the presence of acetone at a temperature of from 5\xb0 C. At least two of the cables form a constraint, such as a kinematic constraint to the apparatus in order to limit the movement of the platform in certain degrees of freedom. A device for depositing or lifting the semiconductor substrate is controlled in this case, the wafer being lifted and redeposited again.