The present micro-electro-mechanical pressure sensor includes a substrate, a dielectric isolation layer, at least two electrodes, and a vibrating membrane. A calibration device of the invention comprises at least one scattering layer, which is preferably non-fluorescent, and a second layer containing one or more fluorophore. The arm members are pivotable between a first position parallel to the main shaft and a second position extending outwardly from the main shaft. During a test of the memory module, the upstream driver is connected to the downstream receiver and the downstream driver is connected to the upstream receiver. The systems can be configured to administer solution comprising therapeutic agent to a subject, and can further comprise an ultrasound applicator for applying ultrasound energy to the subject.