In a process for forming trenches having M different widths in a substrate, a passivation step and an etching step are alternately performed. A housing encasing the shaft and rotor includes, interior end walls adjacent to the rotor disks and an interior side wall. While the sticky application is stuck to the web application, it behaves as if it were a web application with respect to the user. A mixer for a reception system and a mixer for a transmission system are commonly used so as to convert the frequency of the local oscillator signal into a frequency existing between the communication frequency and the intermediate frequency. The material has the advantages of uniform particle size, structure stability, excellent luminous intensity and luminous efficiency. Embodiments directed to the prognosis, staging, andor monitoring of GD, RA and other autoimmune diseases or a predisposition thereto also are provided, along with diagnostic kits for practicing the various embodiments of the invention.