In the manufacturing steps of a super-junction power MOSFET having a drift region having a super junction structure, after the super junction structure is formed, introduction of a body region and the like and heat treatment related thereto are typically performed. Gas phase sample ions or neutral species generated in the spray of one probe can react with reagent gas ions generated from one or more other probes by such ionization methods as Electrospray, photoionization, corona discharge and glow discharge ionization. The first backhaul network receives a piece of first client location information and a piece of second client location information from the first direct-mode communication apparatus and the second backhaul network respectively, and determines a location relationship accordingly. An optically transducing surface of the opto-electronic component is directed downward toward the substrate.