A microscope module for imaging a sample is disclosed. The memory cell array includes a plurality of memory cells connected to a plurality of bit lines and a plurality of word lines. An expandable emboli capturing device is mounted proximate the distal end of the first elongate member, and is movable between a radially expanded position and a radially contracted position. The resulting deposited highly selective ashable hard mask may have decreased stress due to one or more factors including decreased ion and atom impinging on the ashable hard mask and lower levels of hydrogen trapped in the ashable hard mask. This may be achieved either by placing the BSSAP protocol layer over the TCAP layer whereby the TCAP Transaction ID provides the identifier or by modifying the BSSAP protocol to allow for inclusion of the identifier directly into the BSSAP messages. The invention also comprises a method and storage medium.