A radiation-sensitive resin composition is provided which exhibits improved resolution, sensitivity, and focal depth allowance and can eliminate development residues when forming a resist pattern. A plurality of rigid exhausts are directly conjoined to the lid and are in fluid communication with the base member such that the steam is directed upwardly. A plurality of TTE star couplers are connected among each other by way of one or more data lines to form a TTE network. The graphene-polymer layered composite also has the characteristics of graphene in that it has a high electrical conductivity. On exposure to light, the pendant photobase group photolyzes to provide a pendant amine group, that crosslinks the copolymer.