A probe head includes a feeler, a sensor unit, a CPU, a transmitting stage and a producer of electrical energy for supplying energy to the sensor unit, to the CPU and to the transmitting stage. The alumina layer is preferably deposited by CVD and the preferred microstructure and texture are achieved by adding a second metal halide, and a texture modifying agent, to the reaction gas. Simulation result data obtained from simulating the design is then received and processed. The sample buffer, which is coupled to the graphics processor, may be configured to store the samples.