A semi-solid delivery vehicle contains a polyorthoester and an excipient, and a semi-solid pharmaceutical composition contains an active agent and the delivery vehicle. In the apparatus for cleaning and drying a wafer, the wafer is dipped into a cleaning solution in a cleaning tank. Activation of the Peltier did not stop seizures when slices were no longer in direct physical contact with the device, indicating that this was not a field effect. The data line drive transistor is configured such that the drain terminal thereof is connected to the output node of the current DAC. Alternately, the withdrawing members are rotatably connected to the blades, and wafers are withdrawn when the withdrawing members are pivoted to protrude from the blades. Respective carrier alignment fiducials align the substrate carrier and the carrier brackets.