In some embodiments, a chip includes a memory core, error detection circuitry, and a control unit. The mounting portion is configured to actuate with a first circuit board when the circuit board holder attaches to the first circuit board. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the lithographic exposure radiation source. The relative position of this exposed spacer surface is adjustable with respect to the tool. The method includes providing the pulsed signal to control power of a radio frequency signal that is generated by an RF generator. The controller is configured to separately control activation and deactivation of the FM transmitters and determine the carrier frequencies and the one or more AFs based upon incoming EMR.