An illumination system including an optical element, such as an optical filter, which can influence the optical properties of radiation impinging thereon is disclosed. In particular, compounds such as 1-hydroxybenzotriazole-6-carboxylic acid are directly linked to the support under mild conditions. The entire hard mask film 3 is made of a chromium-containing material including tin. The check processing device 1 acquires the magnetic data and front image data, and sends the acquired data to the computer 80. The elements are stacked in columns without turning each of the modular parts mutually between them.